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Enhanced Conversion Efficiencies of Cu2ZnSnS4-Based Thin Film Solar Cells by Using Preferential Etching Technique

Hironori Katagiri, Kazuo Jimbo, Satoru Yamada, Tsuyoshi Kamimura, Win Shwe Maw, Tatsuo Fukano1, Tadashi Ito1, and Tomoyoshi Motohiro1

Department of Electrical and Electronic Systems Engineering, Nagaoka National College of Technology, 888 Nishikatakai, Nagaoka, Niigata 940-8532, Japan
1Materials Department, Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi 480-1192, Japan

(Received November 12, 2007; accepted March 7, 2008; published online April 4, 2008)

Cu2ZnSnS4 (CZTS) thin film solar cells have been fabricated by co-sputtering technique using three targets of Cu, SnS, and ZnS. CZTS-based thin film solar cells over 6.7% efficiency were obtained for the first time by soaking the CZTS layer on the Mo coated soda-lime glass substrate in deionized water (DIW) after forming the CZTS layer. It was found that DIW-soaking had the effect of preferential etching, which eliminated selectively metal oxide particles in the CZTS layer, by electron probe X-ray micro analysis. ©2008 The Japan Society of Applied Physics

DOI: 10.1143/APEX.1.041201

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